Dépôt à basse température par pulvérisation ionique réactive de nitrure de silicium sur AsGa = Low temperature deposition of silicon nitride on AsGa by reactive ion beam sputteringBOSSEBŒUF, Alain.1983, 142 f.-[72] plThesis

Méthodes de caractérisation mécanique des films minces avec des micropoutres et des microponts = Characterization techniques of the mechanical properties of thin films using cantilever microbeams and microbridgesBOSSEBOEUF, Alain; YAHIAOUI, Réda; PETITGRAND, Sylvain et al.Le Vide (1995). 2001, Vol 56, Num 301, pp 581-593, issn 1266-0167Article

Caractérisation de nitrures diélectriques déposés par pulvérisation ionique réactive : applications en microélectroniqueBosseboeuf, Alain; Gautherin, Guy.1989, 421 p.Thesis

Etude de microdispositifs de test pour la caractérisation de propriétés mécaniques de films minces métalliques = Study of test micromechanical devices for the characterization of metallic films mechanical propertiesBoutry, Mathilde; Bosseboeuf, Alain.1997, 259 p.Thesis

Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolutionPETITGRAND, Sylvain; BOSSEBOEUF, Alain.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 9, pp S97-S101, issn 0960-1317Conference Paper

Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trendsBOSSEBOEUF, Alain; PETITGRAND, Sylvain.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 4, pp S23-S33, issn 0960-1317Conference Paper

Nitruration en post-décharge à basse pression de W, Si et SiO₂ pour la microélectronique = Low pressure post-discharge nitridation of W, Si and SiO₂ for microelectronicsKianfar, Shahram; Bosseboeuf, Alain.1994, 194 p.Thesis

Characterization of static and dynamic optical actuation of Al microbeams by microscopic interferometry techniquesPETITGRAND, Sylvain; COURBET, Bérenger; BOSSEBOEUF, Alain et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 4, pp S113-S118, issn 0960-1317Conference Paper

Experimental measurements and behavioral modeling of an electrostatically actuated bi-axial micromirrorPARRAIN, Fabien; MEGHERBI, Souhil; RAYNAUD, Gilles et al.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, pp 89-94, isbn 2-84813-026-1, 6 p.Conference Paper

Les microsystèmes électromécaniques optiques : Microsystèmes optiquesBOSSEBOEUF, Alain; FABBRI, Filippo; PARRAIN, Fabien et al.Photoniques (Orsay). 2012, Num 60, pp 29-32, issn 1629-4475, 4 p.Article

Laser doping for microelectronics and microtechnologySAMET, Thierry; KERRIEN, Gurwan; VENTURINI, Julien et al.Applied surface science. 2005, Vol 247, Num 1-4, pp 537-544, issn 0169-4332, 8 p.Conference Paper

Application of the vortex transform to microscopic interferometryPETITGRAND, Sylvain; BOSSEBOEUF, Alain; GUIRARDEL, Matthieu et al.SPIE proceedings series. 2004, pp 9-15, isbn 0-8194-5380-3, 7 p.Conference Paper

Large-Range MEMS Motion Detection With Subangström Noise Level Using an Integrated Piezoresistive Silicon NanowireETIENNE ALLAIN, Pierre; PARRAIN, Fabien; BOSSEBOEUF, Alain et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 3, pp 716-722, issn 1057-7157, 7 p.Article

High current densities in copper microcoils : influence of substrate on failure modeMOULIN, Johan; WOYTASIK, Marion; GRANDCHAMP, Jean-Paul et al.Microsystem technologies. 2007, Vol 13, Num 11-12, pp 1553-1558, issn 0946-7076, 6 p.Conference Paper

A new technique for 3D profilometry of MEMSLYUBOSHENKO, Igor; BOSSEBOEUF, Alain.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 61110V.1-61110V.8, issn 0277-786X, isbn 0-8194-6153-9, 1VolConference Paper

Electrostatically - : Driven resonator on soi with improved temperature stabilityGIRIDHAR, Archit; VERJUS, Fabrice; MARTY, Frédéric et al.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2006, pp 274-278, isbn 2-916187-03-0, 5 p.Conference Paper

Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysisBRELUZEAU, Cédric; BOSSEBOEUF, Alain; PETITGRAND, Sylvain et al.Proceedings of SPIE. 2005, pp 58580B.1-58580B.12, isbn 0-8194-5858-9, 1VolConference Paper

Piezoelectric micromachined ultrasonic transducers based on PZT thin filmsMURALT, Paul; LEDERMANN, Nicolas; BABOROWSKI, Jacek et al.IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2005, Vol 52, Num 12, pp 2276-2288, issn 0885-3010, 13 p.Article

Experimental measurements and behavioral modeling of an electrostatically actuated bi-axial micromirrorPARRAIN, Fabien; MEGHERBI, Souhil; RAYNAUD, Gilles et al.Microsystem technologies. 2005, Vol 12, Num 1-2, pp 8-14, issn 0946-7076, 7 p.Conference Paper

Study of the NiTi/SiO₂ interface: analysis of the electronic distributionsJARRIGE, Ignace; JONNARD, Philippe; FRANTZ-RODRIGUEZ, Nadège et al.Surface and interface analysis. 2002, Vol 34, Num 1, pp 694-697, issn 0142-2421Conference Paper

Highly decoupled single-crystal silicon resonators : an approach for the intrinsic quality factorLE FOULGOC, Baptiste; BOUROUINA, Tarik; LE TRAON, Olivier et al.Journal of micromechanics and microengineering (Print). 2006, Vol 16, Num 6, issn 0960-1317, S45-S53Conference Paper

In-plane vibration measurement of microdevices by the knife-edge technique in reflection modeBOSSEBOEUF, Alain; BRELUZEAU, Cedric; PARRAIN, Fabien et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63451D.1-63451D.8, issn 0277-786X, isbn 0-8194-6421-X, 1VolConference Paper

Soft x-ray multilayer monochromator with improved resolution and low specular backgroundANDRE, Jean-Michel; BENBALAGH, Rabah; SOULLIE, Gérard et al.X-ray spectrometry. 2001, Vol 30, Num 4, pp 212-215, issn 0049-8246Article

Image Blur Analysis for the Subpixel-level Measurement of In-plane Vibration Parameters of MEMS ResonatorsHA VU LE; GOUIFFES, Michele; PARRAIN, Fabien et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66962D.1-66962D.12, issn 0277-786X, isbn 978-0-8194-6844-4, 2VolConference Paper

High current densities in copper microcoils : Influence of substrate on failure modeMOULIN, Johan; WOYTASIK, Marion; GRANDCHAMP, Jean-Paul et al.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2006, pp 227-232, isbn 2-916187-03-0, 6 p.Conference Paper